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分子泵(Turbo Molecular Pump)主要用于為制造太陽能電池和半導(dǎo)體提供不可或缺的真空環(huán)境。島津分子泵有著世界高水準(zhǔn)的排氣能力，并且有一系列的產(chǎn)品可以滿足不同的太陽能電池模組和硅晶片的工藝需求，隨著市場的擴(kuò)大，我們開發(fā)的腳步也從未停止。
? 超大的排氣流量
? 優(yōu)異的耐腐蝕性能
? 外形緊湊的控制器
? 應(yīng)對生成物對策（選購件）
? 各種監(jiān)測功能
? 網(wǎng)絡(luò)接入對應(yīng)
? 泵轉(zhuǎn)速可調(diào)
? 消費(fèi)電力削減
? 適用于各種規(guī)格
? 無需調(diào)整（泵電纜更換時(shí)，無需對控制器再次調(diào)整）
? 無需蓄電池
Maximum pumping flowrate
High pumping throughput is achieved with a compact body.
Excellent corrosion resistance
Resistant to corrosive gas because dispersed plating is used on the
rotor (TMP-4203LMC, TMP-3403LMC). Dispersed plating with an excellent
heat release characteristic prevents overheat of the rotor caused by
high pumping throughput.
The surface of the rotor of the TMP-2203LMC and TMP-1303LMC is nickel-plated to protect against corrosive gas.
Compact power supply unit
49 % smaller and 50 % lighter as compared to Shimadzu's previous models
Measures against reaction products (optional)
Adding a function for controlling the heater and cooling water to the pump allows it to be kept at a high temperature and prevents the accumulation of reaction products inside it. The temperature controller is built into the compact power supply unit.
Various monitoring functions
LCD on the front panel displays the current, pumping speed, unbalance
amount, errors, and other information. Equipped with a maintenance call
timer.
Equipped with a RS-232C port on the front panel so that operation
information can be loaded on a computer while the pump is operating. You
can find abnormalities (increase of back pressure due to an adhered
reaction product, etc.) in early stages if you compare the condition
with the normal condition. This helps to protect the system from
problems and keep it in good condition.
Network connection enabled
Equipped with RS-232C and RS-485 compliant serial communication
ports, which enables operations to start/stop pumps, monitor operation
status, and load operation history. Up to 32 pumps can be monitored
using a single computer.
Using optional monitor software, multiple pumps can be monitored simultaneously.
Variable pump speed
The pump speed can be set within a range from 25 to 100 % to adjust the pump's throughput. Speed setting can be applied to the adjustment of chamber pressure. Conductance valves can be reduced when used under given conditions.
Reduced power consumption ? Compliant with major standards
CE marking, TüV
NRTL (UL61010A-1)
SEMI S2
SEMI F47
SEMI E74
Tuning-free
Readjustment of the power supply unit is unnecessary during pump cable replacement.
Battery-less
In the case of a power failure, magnetic levitation is maintained using regenerated power, thus reducing wear of the touchdown bearing.
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